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We have measured sputter yields and rates, estimated the instrument efficiency, and calculated useful yields and practical sensitivities for a variety of elements used in the semiconductor industry. We have performed measurements at the system base pressure, and have also introduced oxygen and iodine to determine any enhancement effects."},{"label":"DOI","value":"10.1116/1.588034"},{"label":"Volume","value":"13"},{"label":"Issue","value":"6"},{"label":"Publication Date","value":"D:00 M:11 Y:1995"},{"label":"Publication Information","value":"Copyright 1995 American Vacuum Society. 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